Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 131 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2019-10
Investigation of particle agglomeration with in-situ generation of oxygen bubble during the tungsten chemical mechanical polishing (CMP) process
박진구
2019-02
Selection and Optimization of Corrosion Inhibitors for Improved Cu CMP and Post-Cu CMP Cleaning
박진구
2019-01
Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications
박진구
2019-05
Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime
박진구
2018-10
Fabrication of Stainless Steel Metal Mask with Electrochemical Fabrication Method and Its Improvement in Dimensional Uniformity
박진구
2019-08
Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning
박진구
2019-06
A Breakthrough Method for the Effective Conditioning of PVA Brush Used for Post-CMP Process
박진구
2019-09
Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process
박진구
2020-02
Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
박진구
2017-10
Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle
박진구
previous
1
2
3
4
...
next
next
Discover
-Subject
6
CMP
4
Fixed abrasive pad
4
Megasonic cleaning
4
Particle removal
4
Pellicle
3
Ceria
3
Cleaning
3
Diamond
3
Lapping
3
Pad debris
next >
-Date issued
8
2019
6
2018
6
2017
8
2016
12
2015
8
2014
17
2013
9
2012
8
2011
10
2010
next >
BROWSE
Communities & Collections
Titles
Authors