Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 11 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2008-08
Investigation of Surface Layer Formation for Fluorinated Carbon Film Using Fourier Transform Infrared Spectrometry Analysis
박진구
2008-05
Effect of a guard-ring on the leakage current in a Si-PIN X-ray detector for a single photon counting sensor
박진구
2008-06
Damage free particle removal from extreme ultraviolet lithography mask layers by high energy laser shock wave cleaning
박진구
2008-06
Removal of Organic Wax and Particles on Final Polished Wafer by Ozonated DI Water
박진구
2008-07
The effect of hydrogen peroxide on frictional and thermal behaviors in a citric acid-based copper chemical mechanical planarization slurry
박진구
2008-06
Fabrication of stainless steel mold using electrochemical fabrication method for microfluidic biochip
박진구
2008-04
Effect of sodium periodate in alumina-based slurry on RuCMP for metal-insulator-metal capacitor
박진구
2008-12
Adhesion and Removal of Silica and Ceria Particles on the Wafer Surfaces in STI and Poly Si CMP
박진구
2008-12
Effect of Ozone Supply Methods on PRE in Alkaline Ozone Solutions
박진구
2008-04
Effect of sodium periodate in alumina-based slurry on Ru CMP for metal-insulator-metal capacitor
박진구
previous
1
2
next
Discover
-Subject
2
CMP
1
Additive Gases
1
Adhesion Force
1
Alkaline Solution
1
Alumina Particle
1
anti-stiction layer
1
Benzotriazole (BTA)
1
break-down voltage
1
citric acid
1
Copper
next >
BROWSE
Communities & Collections
Titles
Authors