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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-7 of 7 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2021-04
Investigation of the effect of different cleaning forces on Ce-O-Si bonding during oxide post-CMP cleaning
박진구
2021-03
Mechanisms of colloidal ceria contamination and cleaning during oxide post CMP cleaning
박진구
2019-08
Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning
박진구
2019-06
A Breakthrough Method for the Effective Conditioning of PVA Brush Used for Post-CMP Process
박진구
2009-11
A novel approach for scratch detection and study on dependency of scratches during oxide CMP
박진구
2022-05
Effect of Skin Layer on Brush Loading, Cross-Contamination, and Cleaning Performance during Post-CMP Cleaning
박진구
2007-10
Development of post Ru CMP cleaning solutions
박진구
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Brush scrubbing
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Oxide CMP
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PVA brush
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Break-in process
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Brush skin layer
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Ce-O-Si bonding
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Ce-O-Si bonding, Colloidal Ceria
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Ceria abrasive contamination
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Chemical mechanical planarization...
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Cleaning
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2020 - 2022
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