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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 11-20 of 263 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2019-01
Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications
박진구
2019-05
Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime
박진구
2018-10
Fabrication of Stainless Steel Metal Mask with Electrochemical Fabrication Method and Its Improvement in Dimensional Uniformity
박진구
2005-09
Fabrication of Hot Embossing Plastic Stamps for Microstructure
박진구
2005-07
Particle Adhesion and Removal on EUV Mask Layers During Wet Cleaning
박진구
2005-11
Fabrication of a Patterned Replica by Hot Embossing on Various Thicknesses of PMMA
박진구
2005-09
Ruthenium CMP에서 Cerium Ammonium Nitrate와 알루미나 연마 입자가 연마 거동에 미치는 영향
박진구
2005-07
Laser Shock Removal of Nanoparticles from Si Capping Layer of Extreme Ultraviolet Lithography Masks
박진구
2005-11
Optimizing the Plasma Deposition Process Parameters of Antistiction Layers using a DOE(Design of Experiment)
박진구
2005-06
The Deposition and Characterization of 10nm Thick Teflon-like Anti-stiction Films for the Hot Embossing
박진구
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CMP
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Particle removal
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Post CMP cleaning
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Cu CMP
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Megasonic cleaning
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Chemical mechanical planarization...
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Removal rate
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AFM
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Benzotriazole
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