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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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2021-02
Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules
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2021-08
Inherently Area-Selective Atomic Layer Deposition of SiO2 Thin Films to Confer Oxide Versus Nitride Selectivity
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2021-02
Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules
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Area-selective atomic layer depos...
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Discrete feeding method (DFM)
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Enhanced selectivity
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Vapor-phase inhibitor
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aminosilane precursor
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area-selective atomic layer depos...
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density functional theory
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enlarged deposition selectivity
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inherent substrate-dependent sele...
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