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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-9 of 9 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2020-02
Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
박진구
2020-12
Adhesive resin composites with ceramic nanoparticles for enhanced light extraction efficiency of sandwiched LED device structure
박진구
2020-02
Hybrid DHF and N-2 jet spray cleaning for silicon nitride and metal layer DRAM patterns
박진구
2020-03
Nanocatalyst-induced hydroxyl radical ((OH)-O-center dot) slurry for tungsten CMP for next-generation semiconductor processing
박진구
2020-06
The adsorption and removal of corrosion inhibitors during metal CMP
박진구
2020-12
Contamination Mechanism of Ceria Particles on the Oxide Surface after the CMP Process
박진구
2020-03
Nanocatalyst-induced hydroxyl radical (·OH) slurry for tungsten CMP for next-generation semiconductor processing
박진구
2020-10
Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process
박진구
2020-07
Characterization of Different Cobalt Surfaces and Interactions with Benzotriazole for CMP Application
박진구
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APM
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Chemical cleaning
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DHF
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DIW spray
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DRAM pattern
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Hybrid cleaning
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Adhesion
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Binding energy
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Cerium oxide
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Chemical bonds
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