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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 21-30 of 82 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2008-08
Investigation of Surface Layer Formation for Fluorinated Carbon Film Using Fourier Transform Infrared Spectrometry Analysis
박진구
2009-02
Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave
박진구
2009-02
Effect of O-2 Pretreatment on Fluorinated Carbon Film Surfaces
박진구
2009-02
Effects of size, humidity, and aging on particle removal from Si wafers
박진구
2009-01
Effect of pH in Ru Slurry with Sodium Periodate on Ru CMP
박진구
2009-04
Development of inlaid electrodes for whole column electrochemical detection in HPLC
박진구
2009-10
Effect of Polysilicon Wettability on Polishing and Organic Defects during CMP
박진구
2009-10
Convective Assembly and Dry Transfer of Nanoparticles Using Hydrophobic/Hydrophilic Monolayer Templates
박진구
2004-00
The effect of additives in post-Cu CMP cleaning on particle adhesion and removal
박진구
2005-00
Cu post-CMP cleaning and the effect of additives
박진구
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-Subject
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CMP
5
Cu CMP
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AFM/LFM
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Anti-stiction layer
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BTA
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Chemical mechanical planarization...
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Etch rate
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Hot Embossing
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Nanoimprinting
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-Date issued
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2009
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