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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 71-80 of 88 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2006-09
Metal CMP 용 컨디셔너 디스크 표면에 존재하는 다이아몬드의 형상이 미치는 패드 회복력 변화
박진구
2007-00
Deposition and characterization of antistiction layer for nanoimprint lithography by VSAM (Vapor Self Assembly Monolayer)
박진구
2006-03
PECVD를 이용한 금속 스탬프용 점착방지막 형성과 특성 평가
박진구
2006-12
연마제 특성에 따른 차세대 금속배선용 Al CMP (chemical mechanical planarization) 슬러리 평가
박진구
2006-11
Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology
박진구
2006-08
Dishing and Erosion Evaluations of Tungsten CMP Slurry inthe Orbital Polishing Syste
박진구
2006-06
Interfacial and electrokinetic characterization of IPA solutions related to semiconductor wafer drying and cleaning
박진구
2006-07
Experimental and numerical investigation of nanoparticle removal using acoustic streaming and the effect of time
박진구
2006-11
Large scale directed assembly of nanoparticles using nanotrench templates
박진구
2008-12
Adhesion and Removal of Silica and Ceria Particles on the Wafer Surfaces in STI and Poly Si CMP
박진구
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CMP
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Cu CMP
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adhesion force
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Etch rate
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