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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 51-60 of 88 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2007-11
Damage free particle removal from EUVL mask layers by high energy laser shock cleaning (LSC)
박진구
2007-11
Fabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic biochip
박진구
2007-06
Characterization of SUS Molds for light guide-plates by electro-chemical fabrication (ECF) method
박진구
2007-04
Chemical and nanomechanical characteristics of fluorocarbon thin films deposited by using plasma enhanced chemical vapor deposition
박진구
2007-10
Development of post Ru CMP cleaning solutions
박진구
2007-10
Removal of organic wax and particles on silicon after batch type polishing by ozonated DI water
박진구
2007-06
Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy
박진구
2007-10
Quantitative measurement of pattern collapse and particle removal force
박진구
2007-10
Effect of particle deposition and wet/dry cleaning methods on particle removal efficiency
박진구
2007-10
Surface preparation in CMP process
박진구
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CMP
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Cu CMP
3
adhesion force
3
AFM/LFM
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Anti-stiction layer
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BTA
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Chemical mechanical planarization...
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Etch rate
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Hot Embossing
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Nanoimprinting
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