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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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2003-04
Physical and Chemical Characteristics of the Ceramic Conditioner in Chemical Mechanical Planarization
박진구
2006-09
Metal CMP 용 컨디셔너 디스크 표면에 존재하는 다이아몬드의 형상이 미치는 패드 회복력 변화
박진구
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Ceramic Grooving
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Chemical Mechanical Planarization
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CMP (Chemical Mechanical Polishing)
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Conditioning
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Diamond CVD Technology
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Friction
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Pad Conditioning
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Pad recovery
-Date issued
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2006
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2003
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