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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 11-19 of 19 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2005-07
Polishing Behavior and Characterization of Cu Surface in Citric Acid based Slurry with Corrosion Inhibitor(BTA)
박진구
2005-06
Fabrication of metal line on plastic substrate by hot embossing and CMP process
박진구
2005-03
핫 엠보싱용 점착방지막으로 사용되는 10 nm급 두께의 Teflon-like 박막의 형성 및 특성평가
박진구
2005-11
실험 계획법을 이용한 점착방지막용 플라즈마 증착 공정변수의 최적화 연구
박진구
2005-09
마이크로 구조물 형성을 위한 핫 엠보싱용 플라스틱 스탬프 제작
박진구
2005-07
부식방지제(BTA)가 첨가된 Cu CMP 슬러리에서의 연마거동과
박진구
2005-09
Ruthenium CMP에서 Cerium Ammonium Nitrate와알루미나 연마 입자가 연마 거동에 미치는 영향
박진구
2005-11
Cu Oxide와 Silicon Tip 사이의 나노트라이볼러지 작용
박진구
2005-11
Effect of Corrosion inhibitor, Benzotriazole(BTA), on Particle Adhesion in Cu CMP
박진구
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BTA
3
Nanoimprinting
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AFM/LFM
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Benzotriazole
2
CAN
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CMP
2
Cu CMP
2
Etch rate
2
Hot Embossing
2
hot embossing
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