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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MECHANICAL ENGINEERING(기계공학과)
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2000-03
Effect of chemicals and slurry particles on chemical mechanical polishing of polyimide
안유민
2007-06
The effects of current type and density on dishing phenomena in CMP process
안유민
2002-08
화학기계적연마 공정에서 미소 스크래치 저발생화를 위한 가공기술 연구
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alumina particles
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