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Browsing "COLLEGE OF ENGINEERING SCIENCES[E](공학대학)" byAuthor김태곤

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Showing results 22 to 25 of 25

Issue DateTitleAuthor(s)
2017-12Scalable, sub 2μm pitch, Cu/SiCN to Cu/SiCN hybrid wafer-to-wafer bonding technology김태곤
2019-08Study on possible root causes of contamination from an incoming PVA brush during post-CMP cleaning김태곤
2022-02Study on PVA Brush Loading and Conditioning during Shallow Trench Isolation Post-CMP Cleaning Process김태곤
2019-09Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process김태곤
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