Browsing "COLLEGE OF ENGINEERING SCIENCES[E](공학대학)" byAuthor김호준

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Showing results 8 to 10 of 10

Issue DateTitleAuthor(s)
2024-01-22Numerical optimization of dielectric properties to achieve process uniformity in capacitively coupled plasma reactors김호준
2023-03-06Self-cleaning mechanisms according to the wettability of the surface and deposition material김호준
2021-08Theoretical analysis of Si2H6 adsorption on hydrogenated silicon surfaces for fast deposition using intermediate pressure SiH4 capacitively coupled plasma김호준

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