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Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

Title
Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
Author
이효창
Keywords
Plasma density; Heating; Coils; Kinetic theory; Plasma measurements; Discharges
Issue Date
2011-11
Publisher
IEEE
Citation
IEEE Transactions On Plasma Science, 2011, 39(11), P.2536-2537
Abstract
Inductively coupled plasmas have two operational modes, i.e., capacitive (E) and inductive (H). In this paper, a 2-D plasma density profile was measured with gas pressures during the E-H heating-mode transition. When the discharge is transited from the E mode to the H mode, the 2-D plasma density profile was not changed at a low gas pressure, whereas the evolution of the 2-D plasma density profile was observed at a high gas pressure. These different changes with the gas pressures on the E-H heating-mode transition originated from the transition of the electron kinetics from the nonlocal kinetics to the local kinetics.
URI
https://ieeexplore.ieee.org/document/5762370/http://hdl.handle.net/20.500.11754/51887
ISSN
1939-9375; 0093-3813
DOI
10.1109/TPS.2011.2135382
Appears in Collections:
RESEARCH INSTITUTE[S](부설연구소) > ETC
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