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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-3 of 3 (Search time: 0.001 seconds).
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2013-10
Effect of antenna size on electron kinetics in inductively coupled plasmas
정진욱
2013-01
Real time feedback control of plasma density using a floating probe in semiconductor processing
정진욱
2013-06
Method for measurement of transferred power to plasma in inductive discharges
정진욱
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Antennas
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Coils
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DENSITY
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Dissipated power in system
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DISTRIBUTIONS
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Electron energy distribution func...
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ENERGY DISTRIBUTION FUNCTION
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GAS-DISCHARGES
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GLOW-DISCHARGE
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