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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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2012-04
유도 결합 플라즈마에서 플라즈마 변수와 전자 에너지 분포에 대한 극판 전력 인가의 영향
정진욱
2011-11
Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
정진욱
2013-05
Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas
정진욱
2013-05
Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge
정진욱
2011-01
Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma
정진욱
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Electron energy distribution
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Electron temperature
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Biased inductively coupled plasma
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Capacitively coupled plasma
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Coils
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Discharges
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Electron heating
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Heating
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2013
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