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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-7 of 7 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2017-01
Evolution of electron temperature in inductively coupled plasma
정진욱
2017-01
A study on plasma parameters in Ar/SF6 inductively coupled plasma
정진욱
2015-01
Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas
정진욱
2015-07
Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling
정진욱
2015-10
Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment, and Modeling
정진욱
2011-01
Measurements of the total energy lost per electron-ion pair lost in low-pressure inductive argon, helium, oxygen and nitrogen discharge
정진욱
2020-06
Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna
정진욱
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-Subject
4
TRANSITION
3
PARAMETERS
3
RF DISCHARGE
2
AR
2
ARGON ATOMS
2
CALCULATED CROSS-SECTIONS
2
IMPACT IONIZATION
2
SCATTERING
2
VOLUME-AVERAGED MODEL
1
ASPECT-RATIO
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2020
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2015
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