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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 111-120 of 122 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2019-08
Experimental investigation on the spatial distribution of floating potential at the wafer-level in inductively coupled oxygen plasma
정진욱
2019-09
Experimental investigation on the reduction in antenna coil current during the E to H mode transition in an inductively coupled plasma
정진욱
2020-09
Effect of the RF bias on the plasma density in an argon inductively coupled plasma
정진욱
2020-08
Electrical and plasma characterization of a hybrid plasma source combined with inductively coupled and capacitively coupled plasmas for O atom generation
정진욱
2020-07
A method for measuring plasma parameters and dielectric film thickness by analyzing transient voltages for deposition plasma processing monitoring
정진욱
2020-07
Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma
정진욱
2020-12
Improvement of corrosion properties of plasma in an aluminum alloy 6061-T6 by phytic acid anodization temperature
정진욱
2020-03
Hysteresis and current reduction during E–H mode transition in an inductively coupled plasma
정진욱
2020-02
Improvement of Plasma Resistance of Anodic Aluminum-Oxide Film in Sulfuric Acid Containing Cerium(IV) Ion
정진욱
2019-12
Measurement of the electron energy distribution function in CO2 inductively coupled plasma
정진욱
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DISCHARGE
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ELECTRON-ENERGY DISTRIBUTION
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Inductively coupled plasma
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RF DISCHARGE
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DISCHARGES
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GLOBAL-MODEL
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COUPLED PLASMA
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DENSITY
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ENERGY DISTRIBUTION FUNCTION
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