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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-8 of 8 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2019-10
High efficient plasma generation in an inductively coupled plasma using a passive resonant antenna
김주호
2020-06
Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna
김주호
2021-02
Local electron and ion density control using passive resonant coils in inductively coupled plasma
김주호
2020-02
On the E to H mode transition in a dual frequency (2 and 13.56MHz) inductively coupled plasma
김주호
2020-03
Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas
김주호
2020-07
Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma
김주호
2020-02
On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasma
김주호
2020-03
Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas
김주호
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-Subject
3
PLANAR COIL
2
DISCHARGE
2
DISCHARGES
2
HYSTERESIS
2
LARGE-AREA
2
MODEL
2
POWER
2
RESONANCE
2
SEPARATION
1
ANTENNA
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-Date issued
1
2021
6
2020
1
2019
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