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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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2011-01
Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
정진욱
2011-01
Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
정진욱
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