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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-10 of 16 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2011-10
Measurement of the sheath capacitance of a planar probe
정진욱
2011-11
Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
정진욱
2011-07
Electron energy flux control using dual power in side-type inductively coupled plasma
정진욱
2011-01
Ionization in inductively coupled argon plasmas studied by optical emission spectroscopy
정진욱
2011-04
E-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gas
정진욱
2011-05
Development of Ferrite-Enhanced Side-Type Inductively Coupled Plasma
정진욱
2011-01
Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
정진욱
2011-03
Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas
정진욱
2011-04
Harmonic analysis of sideband signals generated in plasmas
정진욱
2011-02
Observation of pressure gradient and related flow rate effect on the plasma parameters in plasma processing reactor
정진욱
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2
COUPLED PLASMA
2
Electron energy distribution
2
ENERGY
2
Inductively coupled plasma
2
KINETICS
2
PARAMETERS
2
Plasma density
2
SILICON DIOXIDE
2
SUBCUTANEOUS OXIDATION
2
TEMPERATURE
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