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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 11-16 of 16 (Search time: 0.001 seconds).
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Title
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2011-02
Note: Interpolation for evaluation of a two-dimensional spatial profile of plasma densities at low gas pressures
정진욱
2011-01
Effect of DC Bias on the Plasma Properties in Remote Plasma Atomic Layer Deposition and Its Application to HfO2 Thin Films
정진욱
2011-01
Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma
정진욱
2011-01
Measurements of the total energy lost per electron-ion pair lost in low-pressure inductive argon, helium, oxygen and nitrogen discharge
정진욱
2011-09
A plasma diagnostic technique using a floating probe for the dielectric deposition process
정진욱
2011-06
Determination of metastable level densities in a low-pressure inductively coupled argon plasma by the line-ratio method of optical emission spectroscopy
정진욱
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2
COUPLED PLASMA
2
Electron energy distribution
2
ENERGY
2
Inductively coupled plasma
2
KINETICS
2
PARAMETERS
2
Plasma density
2
SILICON DIOXIDE
2
SUBCUTANEOUS OXIDATION
2
TEMPERATURE
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