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Showing results 1 to 8 of 8

Issue DateTitleAuthor(s)
2020-07Control of electron and ion density profiles via virtual ground position control in an inductively coupled plasma김주호
2020-06Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna김주호
2020-03Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas김주호
2020-03Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas김주호
2019-10High efficient plasma generation in an inductively coupled plasma using a passive resonant antenna김주호
2021-02Local electron and ion density control using passive resonant coils in inductively coupled plasma김주호
2020-02On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasma김주호
2020-02On the E to H mode transition in a dual frequency (2 and 13.56MHz) inductively coupled plasma김주호
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