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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRONIC ENGINEERING(융합전자공학부)
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Results 1-6 of 6 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2019-06
Surface-tensile-stress induced polishing-voids in cross-point phase-change-memory cells: corrosion mechanism and solution
박재근
2012-02
Influences of Organic Additive Molecular Weight in Colloidal-Silica-Based Slurry on Final Polishing Characteristics of Silicon Wafer
박재근
2012-01
Study of Ruthenium Oxides Species on Ruthenium Chemical Mechanical Planarization Using Periodate-Based Slurry
박재근
2013-10
Environmentally clean slurry using nano-TiO2-abrasive mixed with oxidizer H2O2 for ruthenium-film chemical mechanical planarization
박재근
2013-01
Effect of Oxidizers on Chemical Mechanical Planarization of Ruthenium with Colloidal Silica Based Slurry
박재근
2020-06
Influence of Scavenger on Abrasive Stability Enhancement and Chemical and Mechanical Properties for Tungsten-Film Chemical-Mechanical-Planarization
박재근
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REMOVAL
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SODIUM PERIODATE
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COPPER
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THIN-FILMS
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