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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRONIC ENGINEERING(융합전자공학부)
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Results 1-4 of 4 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2012-02
Influences of Organic Additive Molecular Weight in Colloidal-Silica-Based Slurry on Final Polishing Characteristics of Silicon Wafer
박재근
2013-10
Environmentally clean slurry using nano-TiO2-abrasive mixed with oxidizer H2O2 for ruthenium-film chemical mechanical planarization
박재근
2013-10
Effect of iron(III) nitrate concentration on tungsten chemical-mechanical-planarization performance
박재근
2013-01
Effect of Oxidizers on Chemical Mechanical Planarization of Ruthenium with Colloidal Silica Based Slurry
박재근
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CMP
2
BEHAVIOR
2
SODIUM PERIODATE
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THIN-FILMS
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ADSORPTION
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Catalyst
1
CELLULOSE CONCENTRATION
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CERIA
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CERIC AMMONIUM-NITRATE
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Chemical mechanical planarization
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-Date issued
3
2013
1
2012
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