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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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2012-12
Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
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2017-03
Studies of thermoelectric transport properties of atomic layer deposited gallium-doped ZnO
박진성
2015-11
Atomic layer deposition of highly conductive indium oxide using a liquid precursor and water oxidant
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Ga doped ZnO
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Indium oxide
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Transparent conducting oxide
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2012
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