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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-4 of 4 (Search time: 0.001 seconds).
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Title
Author(s)
2012-10
Plasma-enhanced atomic layer deposition of Cu-Mn films with formation of a MnSixOy barrier layer
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2014-02
Al2O3/TiO2 multilayer thin films grown by plasma enhanced atomic layer deposition for organic light-emitting diode passivation
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2014-11
Plasma-enhanced atomic layer deposition (PEALD) of cobalt thin films for copper direct electroplating
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2011-03
Effects of the substrate temperature on the Cu seed layer formed using atomic layer deposition
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Cu interconnect
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Cu seed layer
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Aluminum oxide
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CCTBA
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Cobalt
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Copper interconnect
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Direct plating
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Manganese silicate
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Self-forming barrier
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Surface energy
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2014
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2012
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2011
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