Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
Articles
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 91-100 of 103 (Search time: 0.004 seconds).
Item hits:
Issue Date
Title
Author(s)
2022-04
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography
안진호
2022-07
Atomic layer etching of SiO2 using trifluoroiodomethane
안진호
2021-03
Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiNx Films Using Trichlorodisilane for Etch-Resistant Coatings
안진호
2021-07
A new route of synthesizing atomically thin 2D materials embedded in bulk oxides
안진호
2019-07
Through-pellicle imaging of extreme ultraviolet mask with extreme ultraviolet ptychography microscope
안진호
2019-10
Fabrication of free-standing nanoscale SiNx membranes with enhanced burst pressure via improved etching process
안진호
2019-10
Performance of Extreme Ultraviolet Coherent Scattering Microscope
안진호
2020-08
High growth rate and high wet etch resistance silicon nitride grown by low temperature plasma enhanced atomic layer deposition with a novel silylamine precursor
안진호
2020-03
Ozone based high-temperature atomic layer deposition of SiO2 thin films
안진호
2020-03
Memory Operations of Zero Impact Ionization, Zero Subthreshold Swing FET Matrix Without Selectors
안진호
previous
1
...
7
8
9
10
11
next
Discover
-Subject
7
EUVL
5
EUV pellicle
5
FILMS
4
Atomic layer deposition
4
atomic layer deposition
4
EUV
4
EUV lithography
4
Pellicle
3
ANGLE
3
Core-shell
next >
-Date issued
15
2020 - 2022
88
2011 - 2019
BROWSE
Communities & Collections
Titles
Authors