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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-10 of 103 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2017-11
Effects of Y Dopant on Lattice Distortion and Electrical Properties of In3SbTe2 Phase-Change Material
안진호
2017-02
극자외선 노광공정에서의 사이드 로브 세기와 포톤 샷 노이즈 효과가 컨택 홀 missing 현상에 미치는 영향
안진호
2017-01
Nickel and nickel oxide thin films as absorber layer materials of extreme ultraviolet masks
안진호
2017-01
Uniform dehydrogenation of amorphous silicon thin films using a wide thermal annealing system
안진호
2017-12
Effects of an In Vacancy on Local Distortion of Fast Phase Transition in Bi-doped In3SbTe2
안진호
2019-07
Fe3O4-ZnO Core-Shell Nanoparticles Fabricated by Ultra-Thin Atomic Layer Deposition Technique as a Drug Delivery Vehicle
안진호
2018-12
Effects of hydrogen annealing temperature on the resistive switching characteristics of HfOx thin films
안진호
2018-01
Mask Materials and Designs for Extreme Ultra Violet Lithography
안진호
2019-09
Material design for Ge2Sb2Te5 phase-change material with thermal stability and lattice distortion
안진호
2018-02
Thickness-dependent and anisotropic thermal conductivity of black phosphorus nanosheets
안진호
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7
EUVL
5
EUV pellicle
5
FILMS
4
Atomic layer deposition
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atomic layer deposition
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EUV
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EUV lithography
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Pellicle
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ANGLE
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Core-shell
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-Date issued
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2020 - 2022
88
2011 - 2019
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