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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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2013-02
Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
전형탁
2013-02
Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
윤종승
2013-08
원자층증착 기술: 개요 및 응용분야
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crystal structure
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grain size
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thin films
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titanium dioxide
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self-limiting
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spatial ALD
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surface reaction
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