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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 81-88 of 88 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2016-05
6.7nm 리소그래피용 브래그 반사형 거울과 흡수체 물질 연구
안진호
2014-04
Actinic critical dimension measurement of contaminated extreme ultraviolet mask using coherent scattering microscopy
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2014-12
Anode dependence of set voltage in resistive switching of metal/HfO2/metal resistors
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2014-04
Highly sensitive wide bandwidth photodetectors using chemical vapor deposited graphene
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2014-07
Dependence of Interface Charge Trapping on Channel Engineering in Pentacene Field Effect Transistors
안진호
2019-07
Through-pellicle imaging of extreme ultraviolet mask with extreme ultraviolet ptychography microscope
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2019-10
Fabrication of free-standing nanoscale SiNx membranes with enhanced burst pressure via improved etching process
안진호
2019-10
Performance of Extreme Ultraviolet Coherent Scattering Microscope
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EUVL
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Atomic layer deposition
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EUV
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EUV lithography
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EUV pellicle
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FILMS
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Pellicle
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ANGLE
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Core-shell
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EUV Lithography
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