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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-7 of 7 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2011-11
Carbon Contamination Analysis and Its Effect on Extreme Ultra Violet Mask Imaging Performance Using Coherent Scattering Microscopy/In-Situ Accelerated Contamination System
안진호
2011-11
Carbon contamination of EUV mask and its effect on CD performance
안진호
2016-09
극자외선 리소그라피에서의Sub-resolution assist feature를 이용한 근접효과보정
안진호
2016-09
EUV 펠리클 투과도에 따른 이미지 전사 특성 분석
안진호
2015-03
Impact of the non-uniform intensity distribution caused by a meshed pellicle of extreme ultraviolet lithography
안진호
2015-04
Mechanical deflection of a free-standing pellicle for extreme ultraviolet lithography
안진호
2016-03
EUV pellicle 의 standoff 거리에 따른 이미지 전사 특성 평가
안진호
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coherent scattering microscopy (CSM)
2
EUV pellicle
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imaging performance
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Pellicle
2
Reflectivity
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Carbon Contamination
1
Carbon contamination
1
Coherent scattering microscopy
1
critical dimension (CD)
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CSM
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-Date issued
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2016
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2015
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2011
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