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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Title
Author(s)
2017-11
Effects of Y Dopant on Lattice Distortion and Electrical Properties of In3SbTe2 Phase-Change Material
안진호
2017-02
극자외선 노광공정에서의 사이드 로브 세기와 포톤 샷 노이즈 효과가 컨택 홀 missing 현상에 미치는 영향
안진호
2017-01
Nickel and nickel oxide thin films as absorber layer materials of extreme ultraviolet masks
안진호
2017-01
Uniform dehydrogenation of amorphous silicon thin films using a wide thermal annealing system
안진호
2017-12
Effects of an In Vacancy on Local Distortion of Fast Phase Transition in Bi-doped In3SbTe2
안진호
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Absorber Layer
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dehydrogenation
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distortion
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doping
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EUV
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EUV phase shift mask
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hydrogenated amorphous silicon
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In3SbTe2
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Lithography
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