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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-2 of 2 (Search time: 0.001 seconds).
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2013-07
Very Thin Extreme Ultraviolet Mask Absorber Material for Extremely Fine Pitch Patterning
안진호
2013-08
Stochastic Patterning Simulation Using Attenuated Phase-Shift Mask for Extreme Ultraviolet Lithography
안진호
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ARF LITHOGRAPHY
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PRINTABILITY
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PHASE-SHIFTING MASKS
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SIMULATION
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