Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-3 of 3 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2021-12
Microstructures of Hfox films prepared via atomic layer deposition using Ua(NO3)3·6H2O oxidants
안진호
2021-03
Plasma-Enhanced Atomic-Layer Deposition of Nanometer-Thick SiNx Films Using Trichlorodisilane for Etch-Resistant Coatings
안진호
2020-07
A comprehensive study on the effect of tin top and bottom electrodes on atomic layer deposited ferroelectric Hf˂inf˃0.5˂/inf˃Zr˂inf˃0.5˂/inf˃O˂inf˃2˂/inf˃ thin films
안진호
previous
1
next
Discover
-Subject
1
3CDS
1
5O(2)
1
5Zr(0)
1
ALD
1
ferroelectric film
1
hafnium oxide film
1
Hf-0
1
hollow cathode plasma
1
low thermal budget process
1
MOSFET
next >
-Date issued
2
2021
1
2020
BROWSE
Communities & Collections
Titles
Authors