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Browsing "MATERIALS SCIENCE AND ENGINEERING(신소재공학부)" byAuthor박종완

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Showing results 36 to 40 of 40

Issue DateTitleAuthor(s)
2014-01Self-forming Al oxide barrier for nanoscale Cu interconnects created by hybrid atomic layer deposition of Cu-Al alloy박종완
2013-11Self-forming barrier characteristics of Cu-V and Cu-Mn films for Cu interconnects박종완
2014-07Self-forming Mn-based diffusion barriers on low-k substrates박종완
2014-11Self-forming VOx layer as Cu diffusion barrier for low-k dielectrics박종완
2015-02Spectroscopic characteristics of topaz: The impact of electron beam irradiation and heat treatment박종완
12

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