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COLLEGE OF ENGINEERING[S](공과대학)
MECHANICAL ENGINEERING(기계공학부)
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2012-11
Gaussian diffusion sphere model to predict deposition velocity onto wafers in laminar parallel airflow considering thermophoresis
한석영
2012-11
Gaussian diffusion sphere model to predict deposition velocity onto wafers in laminar parallel airflow considering thermophoresis
육세진
2012-10
Particle deposition on face-up flat plates in parallel airflow under the combined influences of thermophoresis and electrophoresis
한석영
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한석영
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SEMICONDUCTOR WAFERS
2
CARRIER SYSTEMS
2
CLEAN ROOM
2
ELECTROPHORESIS
2
EUVL MASKS
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HORIZONTAL AEROSOL FLOW
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INVERTED FLAT SURFACE
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PARTICLE DEPOSITION
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PROTECTION SCHEMES
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Electrophoresis
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