259 0

Full metadata record

DC FieldValueLanguage
dc.contributor.author박진구-
dc.date.accessioned2018-03-23T07:47:17Z-
dc.date.available2018-03-23T07:47:17Z-
dc.date.issued2011-10-
dc.identifier.citationECS Transactions, Semiconductor Cleaning Science and Technology 12, SCST 12. ECS Transactions 2011, 41(5),229-236en_US
dc.identifier.issn1938-5862-
dc.identifier.issn1938-6737-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/51554-
dc.identifier.urihttps://iopscience.iop.org/article/10.1149/1.3630848-
dc.description.abstractCO2 gas cluster cleaning process for nano particles removal without pattern damage was investigated. Gas cluster cleaning process was performed for generating the nano-sized gas cluster in the vacuum chamber. When pressurized CO2 gas was passed through the convergence-divergence (C-D) nozzle, the high speed and high energy gas clusters were generated. The cleaning force of CO2 gas cluster is related to flow rate of the gas and gap distance between the nozzle and substrate. In our studies, the optimum gas flow rate and gap distance for nano-sized particles removal was found, respectively. Pattern damage tests of the poly-Si and a-Si pattern were also evaluated by SEM images. No pattern damages were observed at these optimum conditions.en_US
dc.description.sponsorshipThis work has been partially supported by the Research Center for Integrated Human Sensing System and Post BK21 program. Gas cluster cleaning system was supported by Zeus Co.LTD, Koreaen_US
dc.language.isoenen_US
dc.publisherThe Electrochemical Societyen_US
dc.subjectCleaning processen_US
dc.subjectDamage-freeen_US
dc.subjectGap distancesen_US
dc.subjectGas clustersen_US
dc.subjectHigh energyen_US
dc.subjectNano-sizeden_US
dc.subjectNano-sized particlesen_US
dc.subjectOptimum conditionsen_US
dc.subjectPattern damagesen_US
dc.subjectSEM imageen_US
dc.subjectVacuum chambersen_US
dc.titleNano Gas Cluster Dry Cleaning for Damage Free Particle Removalen_US
dc.typeArticleen_US
dc.relation.no5-
dc.relation.volume41-
dc.relation.page229-236-
dc.contributor.googleauthorKim, Min-Su-
dc.contributor.googleauthorKang, Bong-Kyun-
dc.contributor.googleauthorLee, Seung-Ho-
dc.contributor.googleauthorYoon, Deok-Joo-
dc.contributor.googleauthorChoi, Hoo-Mi-
dc.contributor.googleauthorKim, Ho-Joong-
dc.contributor.googleauthorKim, Tae-Sung-
dc.contributor.googleauthorPark, Jin-Goo-
dc.sector.campusS-
dc.sector.daehakGRADUATE SCHOOL[S]-
dc.sector.departmentDEPARTMENT OF BIONANOTECHNOLOGY-
dc.identifier.pidjgpark-
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > BIONANOTECHNOLOGY(바이오나노학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE