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Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2018-03-23T07:41:13Z | - |
| dc.date.available | 2018-03-23T07:41:13Z | - |
| dc.date.issued | 2011-10 | - |
| dc.identifier.citation | ECS Transactions, Semiconductor Cleaning Science and Technology 12, SCST 12. ECS Transactions, 2011, 41(5),101-107 | en_US |
| dc.identifier.uri | http://ecst.ecsdl.org/content/41/5/101.full.pdf+html | - |
| dc.identifier.uri | http://hdl.handle.net/20.500.11754/51540 | - |
| dc.language.iso | en | en_US |
| dc.publisher | Pennington, N.J.; Electrochemical Society | en_US |
| dc.title | Effect of Acoustic Cavitation on Dissolved Gases and Their Characterization During Megasonic Cleaning | en_US |
| dc.type | Article | en_US |
| dc.relation.no | 5 | - |
| dc.relation.volume | 41 | - |
| dc.relation.page | 101-107 | - |
| dc.contributor.googleauthor | Kang, BKKim, MSLee, SHPark, JGSohn, HS | - |
| dc.sector.campus | S | - |
| dc.sector.daehak | GRADUATE SCHOOL[S] | - |
| dc.sector.department | DEPARTMENT OF BIONANOTECHNOLOGY | - |
| dc.identifier.pid | jgpark | - |
- Appears in Collections:
- GRADUATE SCHOOL[S](대학원) > BIONANOTECHNOLOGY(바이오나노학과) > Articles
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