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Novel Aspect in Grain Size Control of Nanocrystalline Diamond Film for Thin Film Waveguide Mode Resonance Sensor Application

Title
Novel Aspect in Grain Size Control of Nanocrystalline Diamond Film for Thin Film Waveguide Mode Resonance Sensor Application
Author
정두석
Keywords
nanocrystalline diamond; grain growth; nucleation; HFCVD; waveguide mode resonance; optical property
Issue Date
2013-11
Publisher
Amer Chemical SOC
Citation
ACS Applied Matetials & Interfaces, 2013, 5(22), P.11631-11640
Abstract
Nanocrystalline diamond (NCD) thin film growth was systematically investigated for application for the thin film waveguide mode resonance sensor. The NCD thin film was grown on the Si wafer or on the SiO2-coated sapphire substrate using the hot filament chemical vapor deposition (HFCVD). The structural/optical properties of the samples were characterized by the high-resolution scanning electron microscopy (HRSEM), high-resolution transmission electron microscopy (HRTEM), energy dispersive X-ray spectroscopy (EDS), near edge X-ray absorption fine structure (NEXAFS), X-ray diffraction (XRD), and ultraviolet visible (UV-vis) spectroscopy. The waveguide modes of the NCD layer were studied by prism coupler technique using laser (wavelength: 632.8 nm) with varying incident angle. A novel aspect was disclosed in the grain size dependence on the growth temperature at the relatively low methane concentration in the precursor gas, which was important for optical property: the grain size increased with decreasing growth temperature, which was contrary to the conventional knowledge prevailing in the microcrystalline diamond (MCD) domain. We have provided discussions to reconcile such observation. An optical waveguide mode resonance was demonstrated in the visible region using the microstructure-controlled transparent NCD thin film waveguide, which provided a strong potential for the waveguide mode resonance sensor applications.
URI
https://pubs.acs.org/doi/10.1021/am403066k
ISSN
1944-8244
DOI
10.1021/am403066k
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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