테라헤르츠(THz) 파를 이용한 은 나노와이어의 비접촉식 면저항 측정에 관한 연구

Abstract

In this work, non-destructive evaluation was conducted to measure the sheet resistance of silver nanowire coated film and find the damage of that film by using terahertz (THz) wave. Pulse type THz instrument was used, and the measurement was under transmission and pitch-catch reflection type with 30 degree of incidence angle. In transmission type, intensity of the THz wave was gradually increased as the sheet resistance increased. On the other hand, the intensity showed an opposite result in pitch-catch reflection type. Interaction formula was drawn from the relation between intensity and sheet resistance. In addition, damage on the silver nanowire coated film was detected by applying the THz image system. Reliability of the entire film can be also be measured by enlarging the imaging area. Therefore, real-time monitoring using the THz wave can be applied in various industries where it is required to measure the sheet resistance without any damage.