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Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning
- Title
- Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning
- Author
- 박진구
- Keywords
- Megasonic cleaning; Acoustic cavitation; Gas dissolved water; Particle removal; Acoustic bubble growth rate; Pattern damage
- Issue Date
- 2014-02
- Publisher
- Elsevier B.V
- Citation
- Ultrasonics - Sonochemistry, July 2014 21, 4, 1496-1503
- URI
- https://www.sciencedirect.com/science/article/pii/S1350417714000327http://hdl.handle.net/20.500.11754/49259
- ISSN
- 1350-4177
- Appears in Collections:
- GRADUATE SCHOOL[S](대학원) > ETC
- Files in This Item:
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