Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 유홍기 | - |
dc.date.accessioned | 2018-03-19T00:27:55Z | - |
dc.date.available | 2018-03-19T00:27:55Z | - |
dc.date.issued | 2014-10 | - |
dc.identifier.citation | Measurement Science and Technology, 2014, 25(12), 125403 | en_US |
dc.identifier.isbn | 1361-6501 | - |
dc.identifier.issn | 0957-0233 | - |
dc.identifier.uri | http://iopscience.iop.org/article/10.1088/0957-0233/25/12/125403/meta | - |
dc.description.abstract | We propose dual-detection confocal reflectance microscopy (DDCRM) for high-speed 3D surface profiling. In comparison with conventional confocal microscopy, DDCRM can realize surface profiling without axial scanning. DDCRM is composed of two point detectors, each with a pinhole of different size. The ratio of the axial response curves measured by the two detectors provides the relationship between the axial position of the sample and the ratio of the intensity signals. Furthermore, DDCRM has a normalizing effect which allows this method to accurately measure the height of samples with various reflectance characteristics. | en_US |
dc.description.sponsorship | This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (No. NRF-2009-0092825 and NRF-2012R1A1A1041203). | en_US |
dc.language.iso | en | en_US |
dc.publisher | IOP PUBLISHING LTD | en_US |
dc.subject | confocal microscopy | en_US |
dc.subject | 3D microscopy | en_US |
dc.subject | fast imaging | en_US |
dc.title | High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy | en_US |
dc.type | Article | en_US |
dc.relation.no | 12 | - |
dc.relation.volume | 25 | - |
dc.identifier.doi | 10.1088/0957-0233/25/12/125403 | - |
dc.relation.page | 125403-125408 | - |
dc.relation.journal | MEASUREMENT SCIENCE & TECHNOLOGY | - |
dc.contributor.googleauthor | Lee, Dong-Ryoung | - |
dc.contributor.googleauthor | Kim, Young-Duk | - |
dc.contributor.googleauthor | Gweon, Dae-Gab | - |
dc.contributor.googleauthor | Yoo, Hongki | - |
dc.relation.code | 2014035791 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | hyoo | - |
dc.identifier.researcherID | B-6421-2013 | - |
dc.identifier.orcid | http://orcid.org/0000-0001-9819-3135 | - |
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