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High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy

Title
High speed 3D surface profile without axial scanning: dual-detection confocal reflectance microscopy
Author
유홍기
Keywords
confocal microscopy; 3D microscopy; fast imaging
Issue Date
2014-10
Publisher
IOP PUBLISHING LTD
Citation
Measurement Science and Technology, 2014, 25(12), 125403
Abstract
We propose dual-detection confocal reflectance microscopy (DDCRM) for high-speed 3D surface profiling. In comparison with conventional confocal microscopy, DDCRM can realize surface profiling without axial scanning. DDCRM is composed of two point detectors, each with a pinhole of different size. The ratio of the axial response curves measured by the two detectors provides the relationship between the axial position of the sample and the ratio of the intensity signals. Furthermore, DDCRM has a normalizing effect which allows this method to accurately measure the height of samples with various reflectance characteristics.
URI
http://iopscience.iop.org/article/10.1088/0957-0233/25/12/125403/meta
ISBN
1361-6501
ISSN
0957-0233
DOI
10.1088/0957-0233/25/12/125403
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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