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Deposition velocity of particles in charge equilibrium onto a flat plate in parallel airflow under the influence of simultaneous electrophoresis and thermophoresis

Title
Deposition velocity of particles in charge equilibrium onto a flat plate in parallel airflow under the influence of simultaneous electrophoresis and thermophoresis
Author
육세진
Keywords
Deposition velocity; Charge equilibrium; Electrophoresis; Thermophoresis; SEMICONDUCTOR WAFERS; CLEAN ROOM; SIZE RANGE; DIFFUSION; SURFACE
Issue Date
2014-01
Publisher
ELSEVIER SCI LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, OXON, ENGLAND
Citation
JOURNAL OF AEROSOL SCIENCE, 2014,67, Pages 166-176
Abstract
Deposition velocity onto a 450-mm-flat-plate in parallel airflow was numerically investigated by considering the influence of simultaneous electrophoresis and thermophoresis on particles in charge equilibrium. Both the face-up and face-down orientations of the flat plate were considered. When the electric field strength was 0 V/cm, the deposition velocity of particles in charge equilibrium was greatly influenced by thermophoresis, in the size range between 0.005 mu m and 3 mu m. With increasing electric field strength, the deposition velocity of particles in charge equilibrium under the existence of thermophoresis increased for both the face-up and face-down surfaces and the size range of particles affected by thermophoresis became narrower. The electric field of 1000 V/cm appeared to make the deposition velocity of particles in charge equilibrium almost unaffected by thermophoresis. For the face-down surface, the deposition velocity of micrometer-sized particles dropped sharply even with the attractive thermophoresis and electrophoresis, owing to gravitational settling effect. With a strong electric field applied, the deposition velocity of particles smaller than approximately 3 mu m onto both the face-up and face-down surfaces was expected to be high, even thermophoresis was repulsive. (C) 2013 Elsevier Ltd. All rights reserved.
URI
https://www.sciencedirect.com/science/article/pii/S0021850213002188http://hdl.handle.net/20.500.11754/46901
ISSN
0021-8502; 1879-1964
DOI
10.1016/j.jaerosci.2013.10.006
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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