97 0

Discharge mode transition and hysteresis in inductively coupled plasma

Title
Discharge mode transition and hysteresis in inductively coupled plasma
Author
이효창
Keywords
Plasma density; Antennas; Inductively coupled plasma; Coils; H mode
Issue Date
2013-06
Publisher
AMERICAN INSTITUTE OF PHYSICS
Citation
Applied physics letters, 2013, 102(23), pp.234104 -
Abstract
Experimental verification of the discharge mode transition and the hysteresis by considering matching circuit is investigated in inductively coupled plasma using measurements of the plasma density and the power absorption to the plasma. At an argon gas pressure of 100 mTorr where the hysteresis loop of the plasma density had been observed in some previous experiments, there is no hysteresis loop against either the input power or the absorbed power delivered via an automatic impedance matching network. At a higher gas pressure of 350 mTorr, however, the hysteresis loop is clearly seen as functions of both the absorbed power and the input power. This result suggests that the observed hysteresis is due to not only the matching effect but also the nonlinearity of the plasma during capacitive (E) to inductive (H) and H to E heating mode transitions.
URI
http://aip.scitation.org/doi/10.1063/1.4809925http://hdl.handle.net/20.500.11754/46408
ISSN
0003-6951
DOI
10.1063/1.4809925
Appears in Collections:
RESEARCH INSTITUTE[S](부설연구소) > ETC
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE