196 0

PULL-IN INSTABILITY OF CIRCULAR PLATE MEMS: A NEW MODEL BASED ON STRAIN GRADIENT ELASTICITY THEORY

Title
PULL-IN INSTABILITY OF CIRCULAR PLATE MEMS: A NEW MODEL BASED ON STRAIN GRADIENT ELASTICITY THEORY
Author
Xi Chen
Keywords
Size effect; strain gradient elasticity; circular microplate; pull-in voltage
Issue Date
2012-03
Publisher
IMPERIAL COLLEGE PRESS
Citation
International Journal of Mechanics, 2012, 4(1), P.1, 12P.
Abstract
Size-dependent characteristics have been widely observed in microscale devices. For the electrostatically actuated circular microplate-based MEMS, we propose a new model to predict the size-dependent pull-in instability based on the strain gradient elasticity theory. The model embeds three material length scale parameters (MLSPs), which can effectively predict the size-dependent pull-in voltage. The model can be reduced to the classical continuum model when MLSPs are ignored. The results show that the normalized pull-in voltage predicted by the present model increases nonlinearly with the decrease of the size scale of the plate, and the size effect becomes prominent if the characteristic dimension (plate thickness) is on the order of microns or smaller. The effects of the plate thickness and gap on the pull-in voltage are also investigated.
URI
http://www.worldscientific.com/doi/abs/10.1142/S1758825112001324http://hdl.handle.net/20.500.11754/46253
ISSN
1758-8251
DOI
10.1142/S1758825112001324
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > CIVIL AND ENVIRONMENTAL ENGINEERING(건설환경공학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE