Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2018-03-12T07:08:12Z | - |
dc.date.available | 2018-03-12T07:08:12Z | - |
dc.date.issued | 2013-08 | - |
dc.identifier.citation | Journal of Applied Physics, Aug 2013, 114(6), P.063104 | en_US |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://aip.scitation.org/doi/10.1063/1.4818307 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/45491 | - |
dc.description.abstract | Although the laser shockwave cleaning process offers a promising alternative to conventional dry-cleaning processes for nanoscale particle removal, its difficulty in removing organic particles has been an unexplained problem. This work elucidates the physics underlying the ineffectiveness of removing organic particles using laser shock cleaning utilizing polystyrene latex particles on silicon substrates. It is found that the shockwave pressure is high enough to deform the particles, increasing the contact radius and consequently the particle adhesion force. The particle deformation has been verified by high-angle scanning electron microscopy. The Maugis-Pollock theory has been applied to predict the contact radius, showing good agreement with the experiment. (C) 2013 AIP Publishing LLC. | en_US |
dc.description.sponsorship | The work was supported by NSF IUCRC Center for Nano and Microcontamination Control at Northeastern University. This work was also partially supported by the NRF Basic Research Program (2011-0016489). The authors appreciate the laser shock cleaning equipment donation by Innovative Manufacturing Technology (IMT) Co., Ltd., Hwaseong, Gyeonggi-do, Korea. The experiments were conducted at the George J Kostas Nanoscale Technology and Manufacturing Research Center at Northeastern University. | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMERICAN INSTITUTE OF PHYSICS | en_US |
dc.subject | NANOPARTICLE REMOVAL | en_US |
dc.subject | INDUCED PLASMA | en_US |
dc.subject | ADHESION | en_US |
dc.subject | HUMIDITY | en_US |
dc.subject | WAVES | en_US |
dc.title | Shockwave-induced deformation of organic particles during laser shockwave cleaning | en_US |
dc.type | Article | en_US |
dc.relation.no | 6 | - |
dc.relation.volume | 114 | - |
dc.identifier.doi | 10.1063/1.4818307 | - |
dc.relation.page | 63104-63104 | - |
dc.relation.journal | JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.googleauthor | Kim, Tae Hoon | - |
dc.contributor.googleauthor | Cho, Hanchul | - |
dc.contributor.googleauthor | Busnaina, Ahmed | - |
dc.contributor.googleauthor | Kim, Dongsik | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.relation.code | 2013010487 | - |
dc.sector.campus | S | - |
dc.sector.daehak | GRADUATE SCHOOL[S] | - |
dc.sector.department | DEPARTMENT OF BIONANOTECHNOLOGY | - |
dc.identifier.pid | jgpark | - |
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