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dc.contributor.author박진구-
dc.date.accessioned2018-03-12T07:08:12Z-
dc.date.available2018-03-12T07:08:12Z-
dc.date.issued2013-08-
dc.identifier.citationJournal of Applied Physics, Aug 2013, 114(6), P.063104en_US
dc.identifier.issn0021-8979-
dc.identifier.urihttp://aip.scitation.org/doi/10.1063/1.4818307-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/45491-
dc.description.abstractAlthough the laser shockwave cleaning process offers a promising alternative to conventional dry-cleaning processes for nanoscale particle removal, its difficulty in removing organic particles has been an unexplained problem. This work elucidates the physics underlying the ineffectiveness of removing organic particles using laser shock cleaning utilizing polystyrene latex particles on silicon substrates. It is found that the shockwave pressure is high enough to deform the particles, increasing the contact radius and consequently the particle adhesion force. The particle deformation has been verified by high-angle scanning electron microscopy. The Maugis-Pollock theory has been applied to predict the contact radius, showing good agreement with the experiment. (C) 2013 AIP Publishing LLC.en_US
dc.description.sponsorshipThe work was supported by NSF IUCRC Center for Nano and Microcontamination Control at Northeastern University. This work was also partially supported by the NRF Basic Research Program (2011-0016489). The authors appreciate the laser shock cleaning equipment donation by Innovative Manufacturing Technology (IMT) Co., Ltd., Hwaseong, Gyeonggi-do, Korea. The experiments were conducted at the George J Kostas Nanoscale Technology and Manufacturing Research Center at Northeastern University.en_US
dc.language.isoenen_US
dc.publisherAMERICAN INSTITUTE OF PHYSICSen_US
dc.subjectNANOPARTICLE REMOVALen_US
dc.subjectINDUCED PLASMAen_US
dc.subjectADHESIONen_US
dc.subjectHUMIDITYen_US
dc.subjectWAVESen_US
dc.titleShockwave-induced deformation of organic particles during laser shockwave cleaningen_US
dc.typeArticleen_US
dc.relation.no6-
dc.relation.volume114-
dc.identifier.doi10.1063/1.4818307-
dc.relation.page63104-63104-
dc.relation.journalJOURNAL OF APPLIED PHYSICS-
dc.contributor.googleauthorKim, Tae Hoon-
dc.contributor.googleauthorCho, Hanchul-
dc.contributor.googleauthorBusnaina, Ahmed-
dc.contributor.googleauthorKim, Dongsik-
dc.contributor.googleauthorPark, Jin-Goo-
dc.relation.code2013010487-
dc.sector.campusS-
dc.sector.daehakGRADUATE SCHOOL[S]-
dc.sector.departmentDEPARTMENT OF BIONANOTECHNOLOGY-
dc.identifier.pidjgpark-
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GRADUATE SCHOOL[S](대학원) > BIONANOTECHNOLOGY(바이오나노학과) > Articles
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