Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2018-03-11T06:30:26Z | - |
dc.date.available | 2018-03-11T06:30:26Z | - |
dc.date.issued | 2013-04 | - |
dc.identifier.citation | KOREAN JOURNAL OF METALS AND MATERIALS 권: 51 호: 4 페이지: 259-264 | en_US |
dc.identifier.issn | 1738-8228 | - |
dc.identifier.uri | http://210.101.116.102/journal_korea/detail_01.asp?a_key=3129872# | - |
dc.description.abstract | The optimum conditions for FOTS films deposited as vapor self-assembled monolayers for producing a hydrophobic film with low roughness was determined to be 10 Torr and 50 degrees C. The root mean square (RMS) of film roughness was 0.72 nm and its contact angle 108.14 degrees. These conditions are much simpler than the conventional process in which high temperature is known to result in high contact angles and reduced agglomeration of precursor molecules and roughness. However, we found that optimized hydrophobic FOTS film that provides an anti-stiction layer in micro-electro-mechanical systems can be obtained at low temperature and high pressure with a comparable contact angle to and lower roughness than the film obtained using the conventional process. | en_US |
dc.description.sponsorship | National Research Foundation of Korea (NRF) grant Korea government (MEST)baisc Science Research Program through the National Research Foundation of Korea (NRF) Ministry of Education, Science and Technology | en_US |
dc.language.iso | en | en_US |
dc.publisher | KOREAN INST METALS MATERIALS, POSCO CENTER, 4TH FL (EAST WING), 892 DAECHI-4-DONG, KANGNAM-KU, SEOUL 135-777, SOUTH KOREA | en_US |
dc.subject | thin films | en_US |
dc.subject | vapor deposition | en_US |
dc.subject | surface | en_US |
dc.subject | atomic force microscopy (AFM) | en_US |
dc.subject | self assembled monolayer | en_US |
dc.title | Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers | en_US |
dc.type | Article | en_US |
dc.relation.volume | 51 | - |
dc.identifier.doi | 10.3365/KJMM.2013.51.4.259 | - |
dc.relation.page | 259-264 | - |
dc.relation.journal | KOREAN JOURNAL OF METALS AND MATERIALS | - |
dc.contributor.googleauthor | Kim, Dong-Chan | - |
dc.contributor.googleauthor | Kwon, Tae-Young | - |
dc.contributor.googleauthor | Kim, Hyuk-Min | - |
dc.contributor.googleauthor | Lim, Hyun-Wo | - |
dc.contributor.googleauthor | Roh, Ji-Young | - |
dc.contributor.googleauthor | Lee, Caroline Sunyong | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.relation.code | 2013005800 | - |
dc.sector.campus | S | - |
dc.sector.daehak | GRADUATE SCHOOL[S] | - |
dc.sector.department | DEPARTMENT OF BIONANOTECHNOLOGY | - |
dc.identifier.pid | jgpark | - |
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